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400-0305-668
库存状态:现货
ASM AMERICA 镀膜机腔体 PULSAR 3000 采用 ALD 技术,能精确控制薄膜生长,实现原子级别的厚度精度和均匀性。主要应用于半导体制造,用于沉积高 k 电介质、金属栅极等薄膜,以满足先进芯片制造工艺的需求。
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