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库存状态:现货
佳能光刻机 FPA-6000ES6A 是 KrF 扫描式光刻机1。它利用 248nm 激光,通过先进光学系统和工作台控制,将掩模图案精确转移到晶圆上,用于 90nm 及以上节点的半导体器件制造,如存储芯片和逻辑芯片247。
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