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库存状态:现货
佳能光刻机 FPA-5500iza 是 i 线步进式光刻机,光源为 365nm 水银灯。它通过精确控制光罩与晶圆的相对位置,实现高精度曝光,可用于 28nm 及以上节点芯片制造,也适用于全画幅 CMOS 等小型显示设备制造。
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