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400-0305-668
库存状态:现货
应用材料的 REMOTE AC RACK UVR,BASIC,PRODUCER 远程等离子源,可产生远程等离子体,用于晶圆表面处理等。能实现高效、均匀的等离子体处理,应用于半导体制造中薄膜沉积、刻蚀等工艺的预处理或后处理环节。
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