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ULVAC 真空泵 PRC - 006A 是一种机械增压泵,常与干泵、油回转泵等配合,可提高 10kPa - 0.1Pa 领域的排气速度。它适用于对洁净度要求高的半导体、液晶制造等领域,也用于真空干燥、分析仪器等多种真空相关场景。
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