ADTEC 旧射频等离子体信号发生器 AX-3000

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ADTEC 旧射频等离子体信号发生器 AX - 3000 能产生稳定射频信号，通过电场使气体放电形成等离子体12。可用于半导体刻蚀、镀膜等工艺，也用于化学分析仪器中使样品离子化，以进行成分分析8。

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