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400-0305-668
库存状态:现货
ULVAC 旧真空泵 PMB 006CM 属于机械增压泵,采用无油设计,泵腔无润滑油脂,可稳定处理水蒸气或溶剂蒸汽39。其抽速达 500-600m³/h(50/60Hz),极限压力 4.0×10⁻¹Pa,主要部件经阳极氧化处理,耐腐蚀性能优异39。常与前级泵联用,提升 10kPa 至 0.1Pa 区间抽速,适用于真空加热炉、熔炼炉、空间模拟舱等大体积抽气场景,以及半导体制造中的蒸发、溅射工艺310。
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