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库存状态：现货
EBARA 干式真空泵 AA70W 采用多级罗茨技术，无油设计，抽速达 300 CFM，极限压力低至 1 mTorr16。水冷屏蔽电机驱动三叶转子，确保稳定运行，镍合金材质增强耐腐蚀性，适用于处理腐蚀性气体916。支持与涡轮分子泵联动，提供高真空环境，广泛应用于半导体制造中的 PVD 镀膜、晶圆蚀刻及光伏电池生产等场景，尤其在需要快速排气的高精密工艺中表现优异117。
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