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400-0305-668
库存状态:现货
INFICON 质谱分析仪 CPM100 (339) 基于四极质谱技术,可实时分析气体成分,检测限达亚 ppm 级,支持 1-300 AMU 质量范围。其集成 HexBlock™采样系统和电容隔膜计(CDG),实现高精度过程监控与真空联锁,适用于半导体制造中的蚀刻、CVD 工艺及工业气体纯度检测,兼容腐蚀性环境并提供智能数据分析功能。
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