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BALZERS 涡轮分子泵 TPU 240 能通过高速旋转的转子携带气体分子，实现 10⁻¹¹mbar 的极限真空4。抽气速率高，对不同气体有不同抽速和压缩比4。常用于半导体制造、真空镀膜、电子显微镜等对真空度要求高的领域。
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