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PFEIFFER 涡轮分子泵 TMH 065 采用半磁浮轴承技术，运行振动小、噪音低4。能产生高真空和超高真空，抽速为 56L/s，极限压力达 10⁻¹⁰mbar2。广泛应用于科研、半导体等领域，可用于抽除各类气体，为相关工艺提供真空环境2。
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