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PFEIFFER 涡轮分子泵 TMH 260 采用半磁浮轴承技术，永磁轴承与陶瓷滚珠轴承结合，运行稳定且低振动。抽速达 210 L/s（N₂），极限压力低至 10⁻¹⁰ mbar，支持任意角度安装，结构紧凑。适用于半导体制造中的蚀刻、CVD 工艺，以及真空镀膜、质谱分析、科研设备等对超高真空要求严苛的场景，尤其适合处理腐蚀性气体或复杂工艺环境。
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