TOKYO ELECTRON AT LIMIED 表面清洗设备 TERRESTA MB

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库存状态：现货

TOKYO ELECTRON LIMITED 的 TERRESTA MB 表面清洗设备专为半导体晶圆制造设计，采用先进湿法清洗技术，可高效去除颗粒、有机物及金属污染物。其模块化设计支持 300mm 晶圆处理，集成兆声波与旋转喷淋功能，确保纳米级洁净度。适用于光刻、蚀刻、离子注入等关键制程前后的精密清洗，尤其在先进逻辑芯片和存储芯片制造中表现优异，助力提升生产良率与可靠性。

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