HITACHI KOKUSAI ELECTRIC INC 气相沉淀设备 DD-1206V-DF

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HITACHI KOKUSAI ELECTRIC INC 的 DD-1206V-DF 是低压化学气相沉积设备7。能精确控制薄膜沉积，通过气态物质化学反应在晶圆等基体上形成高质量薄膜，用于半导体制造中绝缘层、导电层等薄膜制备37。

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