RORZE 晶圆搬运工业机器人 RSC140-003-002

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库存状态：现货

RORZE 晶圆搬运工业机器人 RSC140-003-002 专为半导体制造设计，具备高精度晶圆取放与搬运功能，支持 300mm 晶圆及洁净室环境910。其集成多轴联动控制技术，可实现快速、稳定的晶圆传输，适用于光刻、蚀刻、检测等制程设备对接，满足 3nm 先进制程产线需求9。设备采用防碰撞传感器与自动化传输模块，兼容工厂自动化布局，广泛应用于逻辑芯片、存储芯片及显示面板的量产与研发，确保高良率与生产效率910。

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