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库存状态:现货
应用材料的 REMOTE AC RACK UVR 远程等离子源,能在真空环境下产生等离子体,用于腔室清洗、薄膜蚀刻、表面处理等工艺,在半导体制造、材料科学等领域有广泛应用,可提高工艺精度与产品质量。
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