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库存状态:现货
东京电子的蚀刻机 TRIAS 是一种低温蚀刻设备1。可在 - 70°C 环境下工作,能快速蚀刻深孔,速度达传统设备三倍,采用氟化氢气体,更环保,主要应用于 3D NAND 闪存芯片制造1。
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