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库存状态:现货
MKS R*evolution 远程等离子源能高效产生低温等离子体,具有灵活、精度高、损伤小等特点12。可用于半导体制造中的薄膜蚀刻、腔室清洗,以及材料改性、表面处理等工艺,在半导体、材料等领域应用广泛1。
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