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库存状态:现货
ENI GHW - 50A 是 13.56MHz、5000W 的射频电源1。具有负载失配保护功能,当反向功率达额定 20% 后,自动限制正向功率1。主要应用于半导体制造等领域的等离子增强化学气相沉积、蚀刻等薄膜工艺1。
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